* a M5 line (26um wide, 1um thick) over Si substrate 8um below, sigma=2.6e7 * 430um thick substrate, sigma=1.5e4 1/(ohm*m) * line length=1000um .units uM * * Define substrate, sigma=1.5e4 1/(m*ohm)= 0.015 1/(um*ohm) g1 x1 = -1500 y1 = -1500 z1 = 0 + x2 = 1500 y2 = -1500 z2 = 0 + x3 = 1500 y3 = 1500 z3 = 0 + thick = 430 sigma= 0.015 *+ seg1 = 100 seg2 = 100 + file=NONE * under the trace + contact decay_rect (0,0,0,50,2000,13,3000,500,3000) * the contacts + contact decay_rect (0,-1000,0,30,30,10,10,3000,3000) + contact decay_rect (0, 1000,0,30,30,10,10,3000,3000) + + nhinc = 3 rh=2 * nodes to reference later: + np1 (0,-1000,0) + np2 (0,1000,0) * * line width=26um * thick h=1um sigma=2.6e7 1/(m*ohm)=26 1/(um*ohm) * NS1 x=0 y=-1000 z=223.5 NS2 x=0 y=1000 z=223.5 EM5 NS1 NS2 w=26 h=1 sigma=26 nwinc=4 nhinc=1 .equiv NS2 np2 .external NS1 np1 * .freq fmin=3.3e8 fmax=3.3e8 ndec=1 .end